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19 December 1986 The Measuring Method And Accuracy Of Thickness Of Optical Thin Film
Jin-nian Li
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Proceedings Volume 0679, Current Developments in Optical Engineering and Diffraction Phenomena; (1986) https://doi.org/10.1117/12.939569
Event: 30th Annual Technical Symposium, 1986, San Diego, United States
Abstract
In this paper, the measuring accuracy about the angstrommeter is searched, and a special measuring method about the thickness of the optical coating is developed. A "fully assembling optical coating block" is used successfully. It consists of three kinds of optical coating from which 7 sorts of thickness can be formed. Properly choosing the arrangement model, we can composs 19 coudition equations. According to the theory of matrix square-error, we deduced the measuring accuracy of the coating thickness and the measuring accuracy of the interferometer itself. The method is also useful for some other films.
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Jin-nian Li "The Measuring Method And Accuracy Of Thickness Of Optical Thin Film", Proc. SPIE 0679, Current Developments in Optical Engineering and Diffraction Phenomena, (19 December 1986); https://doi.org/10.1117/12.939569
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KEYWORDS
Thin films
Optical coatings
Thin film deposition
Diffraction
Error analysis
Optical engineering
Coating
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