Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system

Cheng Gong; Yuejin Zhao; Liquan Dong; Mei Hui; Xiaomei Yu; Xiaohua Liu

doi:10.1117/1.OE.52.2.026403

5 February 2013 Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system

Cheng Gong, Yuejin Zhao, Liquan Dong, Mei Hui, Xiaomei Yu, Xiaohua Liu

Author Affiliations +

Optical Engineering, Vol. 52, Issue 2, 026403 (February 2013). https://doi.org/10.1117/1.OE.52.2.026403

Abstract

We aim to study the short-wave infrared (SWIR), medium-wave infrared (MWIR), and long-wave infrared (LWIR) imaging ability based on optical readout bimaterial microcantilever focal plane array (FPA) uncooled infrared imaging system. First, the principle of the bimaterial microcantilever sensing and the fabrication of the microcantilever array are introduced. Second, the optical-thermal-mechanical sensing theories based on the FPA are given. Finally, an optical readout microcantilever FPA infrared imaging system is developed for SWIR, MWIR, and LWIR imaging experiments. The experimental results show that the system can acquire the clear images of the SWIR, MWIR, and LWIR targets.

© The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

Citation Download Citation

Cheng Gong, Yuejin Zhao, Liquan Dong, Mei Hui, Xiaomei Yu, and Xiaohua Liu "Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system," Optical Engineering 52(2), 026403 (5 February 2013). https://doi.org/10.1117/1.OE.52.2.026403

Published: 5 February 2013

ACCESS THE FULL ARTICLE

JOURNAL ARTICLE
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY