Colloidal quantum dot imagers for short-wave infrared (SWIR) sensing with high resolution in a compact form factor

Pawel E. Malinowski; Vladimir Pejovic; Abu Bakar Siddik; Mahmoud Hamamou; Quazi Mohd Arman Uz Zaman; Itai Lieberman; Joo Hyoung Kim; Myung jin Lim; Luis Moreno Hagelsieb; Isabel Pintor Monroy; Wenya Song; Nikolas Papadopoulos; Zohreh Zahiri; Jonas Bentell; Steven Thijs; Naresh Chandrasekaran; Gauri Karve; Paul Heremans; Jiwon Lee; David Cheyns

doi:10.1117/12.3002257

13 March 2024 Colloidal quantum dot imagers for short-wave infrared (SWIR) sensing with high resolution in a compact form factor

Pawel E. Malinowski, Vladimir Pejovic, Abu Bakar Siddik, Mahmoud Hamamou, Quazi Mohd Arman Uz Zaman, Itai Lieberman, Joo Hyoung Kim, Myung jin Lim, Luis Moreno Hagelsieb, Isabel Pintor Monroy, Wenya Song, Nikolas Papadopoulos, Zohreh Zahiri, Jonas Bentell, Steven Thijs, Naresh Chandrasekaran, Gauri Karve, Paul Heremans, Jiwon Lee, David Cheyns

Author Affiliations +

Proceedings Volume PC12913, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V; PC1291308 (2024) https://doi.org/10.1117/12.3002257
Event: SPIE AR | VR | MR, 2024, San Francisco, California, United States

Abstract

In this paper, we present thin-film photodetector (TFPD) image sensors for the short-wave infrared (SWIR) range. Monolithic integration of quantum dot (QD) absorbers enables quantum efficiency of 70% at 1400 nm and pixel pitch below 2 μm. We present image sensors on custom CMOS readout fabricated using 130 nm node. We review latest advancements on the photodiode stack and the pixel engine, including the thin-film pinned photodiode architecture. Furthermore, we study the manufacturing flows to realize full wafer capability for volume processing. QD image sensors are paving the way to add augmented vision into future XR systems with extra functionalities.

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Pawel E. Malinowski, Vladimir Pejovic, Abu Bakar Siddik, Mahmoud Hamamou, Quazi Mohd Arman Uz Zaman, Itai Lieberman, Joo Hyoung Kim, Myung jin Lim, Luis Moreno Hagelsieb, Isabel Pintor Monroy, Wenya Song, Nikolas Papadopoulos, Zohreh Zahiri, Jonas Bentell, Steven Thijs, Naresh Chandrasekaran, Gauri Karve, Paul Heremans, Jiwon Lee, and David Cheyns "Colloidal quantum dot imagers for short-wave infrared (SWIR) sensing with high resolution in a compact form factor", Proc. SPIE PC12913, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V, PC1291308 (13 March 2024); https://doi.org/10.1117/12.3002257

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KEYWORDS

Short wave infrared radiation

Colloidal quantum dots

Image resolution

Infrared imaging

Infrared radiation

Imaging systems

Infrared sensors

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