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Over the past 15 years since their first demonstration, subwavelength grating metamaterials in silicon photonic devices have become widely used and attracted rapidly growing research interest while also breaking into commercial applications. We will discuss recent advances in this research field, with a focus on novel components and circuits for beam steering applications, on-chip filtering and quantum optics. On-chip optical waveguides comprised of Mie resonant particle chains have only recently been demonstrated and promise to be the foundation of a new and exciting branch of integrated metamaterials research. We will review the early work in this area.
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