Over the past 15 years since their first demonstration, subwavelength grating metamaterials in silicon photonic devices have become widely used and attracted rapidly growing research interest while also breaking into commercial applications. We will discuss recent advances in this research field, with a focus on novel components and circuits for beam steering applications, on-chip filtering and quantum optics. On-chip optical waveguides comprised of Mie resonant particle chains have only recently been demonstrated and promise to be the foundation of a new and exciting branch of integrated metamaterials research. We will review the early work in this area.
In this talk we present on recent advancements in hybrid-glass waveguides on silicon photonic platforms. We describe novel monolithic hybrid integration approaches and waveguide designs for functional glass claddings on silicon-on-insulator (SOI). We describe our results on low-loss hybrid tellurite-silicon waveguides, high-Q resonators, and amplifiers and lasers and our recent efforts to optimize their performance and utility in silicon photonic systems. Such devices are promising for new functionalities in sensing, metrology, computing, and communications applications.
We describe a prototyping process for silicon nitride photonic integrated circuits, targeting applications in the visible and near-infrared wavelength ranges. The platform is based on direct-write electron beam lithography technology and provides a route toward the rapid fabrication of passive and thermo-optic active photonic devices. The fabrication turnaround time is on the order of several weeks, and critical feature sizes are demonstrated down to 100 nm which enables the fabrication of subwavelength metastructures. Two waveguiding material thicknesses have been demonstrated, 150 nm for visible light applications and 400 nm for infrared.
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