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We have developed a static Fabry Perot based filter array operating in the mid-infrared range from ~2 to 4.5 μm, matching the absorption region of several volatile organic compounds. Each filter consists of a cavity system formed by two distributed bragg reflectors with a tuning element with varying length in between. The filters with high transmission (>80%) and controllable transmission peak width are integrated with an array of pyroelectric detectors. The robustness, easy-fabrication and the possibility to tune the optical response to a specific application make the integrated filter arrays suitable for compact sensing systems.
Kaylee D. Hakkel,Maurangelo Petruzzella,Martin Ebermann,Francesco Pagliano,Don M. J. van Elst,Anne van Klinken, andAndrea Fiore
"High-performance mid-infrared filter arrays for gas sensing", Proc. SPIE PC11997, Optical Components and Materials XIX, PC119970B (1 April 2022); https://doi.org/10.1117/12.2606043
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Kaylee D. Hakkel, Maurangelo Petruzzella, Martin Ebermann, Francesco Pagliano, Don M. J. van Elst, Anne van Klinken, Andrea Fiore, "High-performance mid-infrared filter arrays for gas sensing," Proc. SPIE PC11997, Optical Components and Materials XIX, PC119970B (1 April 2022); https://doi.org/10.1117/12.2606043