Scanning Fabry-Perot filter for terahertz spectroscopy based on silicon dielectric mirrors

Justin W. Cleary; Chris J. Fredricksen; Andrei V. Muravjov; Jasen Enz; Maxim V. Dolguikh; Todd W. Du Bosq; Robert E. Peale; William R. Folks; Sidhartha Pandey; Glenn Boreman; Oliver Edwards

doi:10.1117/12.700718

8 February 2007 Scanning Fabry-Perot filter for terahertz spectroscopy based on silicon dielectric mirrors

Justin W. Cleary, Chris J. Fredricksen, Andrei V. Muravjov, Jasen Enz, Maxim V. Dolguikh, Todd W. Du Bosq, Robert E. Peale, William R. Folks, Sidhartha Pandey, Glenn Boreman, Oliver Edwards

Author Affiliations +

Proceedings Volume 6472, Terahertz and Gigahertz Electronics and Photonics VI; 64720E (2007) https://doi.org/10.1117/12.700718
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

A scanning Fabry-Perot transmission filter composed of a pair of dielectric mirrors has been demonstrated at millimeter and sub-millimeter wavelengths. The mirrors are formed by alternating quarter-wave optical thicknesses of silicon and air in the usual Bragg configuration. Detailed theoretical considerations are presented for determining the optimum design. Characterization was performed at sub-mm wavelengths using a gas laser together with a Golay cell detector and at mm-wavelengths using a backward wave oscillator and microwave power meter. High resistivity in the silicon layers was found important for achieving high transmittance and finesse, especially at the longer wavelengths. A finesse value of 411 for a scanning Fabry-Perot cavity composed of three-period Bragg mirrors was experimentally demonstrated. Finesse values of several thousand are considered to be within reach. This suggests the possibility of a compact terahertz Fabry-Perot spectrometer that can operate in low resonance order to realize high free spectral range while simultaneously achieving a high spectral resolution. Such a device is directly suitable for airborne/satellite and man-portable sensing instrumentation.

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Justin W. Cleary, Chris J. Fredricksen, Andrei V. Muravjov, Jasen Enz, Maxim V. Dolguikh, Todd W. Du Bosq, Robert E. Peale, William R. Folks, Sidhartha Pandey, Glenn Boreman, and Oliver Edwards "Scanning Fabry-Perot filter for terahertz spectroscopy based on silicon dielectric mirrors", Proc. SPIE 6472, Terahertz and Gigahertz Electronics and Photonics VI, 64720E (8 February 2007); https://doi.org/10.1117/12.700718

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