Development of heat resistant polyphenol compounds applied to the spin-on carbon hardmask

Takashi Makinoshima; Takashi Satou; Junya Horiuchi; Kana Okada; Yoko Shimizu; Masatoshi Echigo

doi:10.1117/12.2218946

21 March 2016 Development of heat resistant polyphenol compounds applied to the spin-on carbon hardmask

Takashi Makinoshima, Takashi Satou, Junya Horiuchi, Kana Okada, Yoko Shimizu, Masatoshi Echigo

Proceedings Volume 9779, Advances in Patterning Materials and Processes XXXIII; 97791K (2016) https://doi.org/10.1117/12.2218946
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

In this paper, we report the development of a new polyphenol, NF7177, applied to the Spin-On Carbon Hardmask and the thermosetting properties. The new polyphenol derivatives were easily synthesized by the condensation of aldehydes and dihydroxybiphenyl compounds. We found new polyphenol NF7177 was showed the good applicability to the raw material for the Spin-On Carbon Hardmask [1]. It was indicated that the heat resistance of NF7177 was due to cross-linking based on dehydration reaction. Furthermore the thermosetting properties seem to be depend on the number and position of OH group.

Citation Download Citation

Takashi Makinoshima, Takashi Satou, Junya Horiuchi, Kana Okada, Yoko Shimizu, and Masatoshi Echigo "Development of heat resistant polyphenol compounds applied to the spin-on carbon hardmask", Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 97791K (21 March 2016); https://doi.org/10.1117/12.2218946

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