Modeling and simulation of the beam steering unit

Jiayun Feng; Xiaoping Li; Xin He; Jinchun Wang

doi:10.1117/12.2084588

18 March 2015 Modeling and simulation of the beam steering unit

Jiayun Feng, Xiaoping Li, Xin He, Jinchun Wang

Proceedings Volume 9426, Optical Microlithography XXVIII; 942623 (2015) https://doi.org/10.1117/12.2084588
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Production lithography is undergoing a technology shift, and the requirements of beam delivery system (BDS) are increasing which also raises the precision requirements of the beam steering units (BSU) in BDS. In essence, the BSU is a two rotational degree of freedom platform. In this paper, a BSU based on 3-RPS flexure parallel mechanism is proposed. By analyzing the relationship between the unit’s dimensions and mechanics, a mathematical model is built. Then the BSU with a balance between lower stress of the flexure hinges and higher accuracy of the unit can be got by optimizing the dimensions with the mathematical model. Finally a simulation is conducted to verify the design.

Citation Download Citation

Jiayun Feng, Xiaoping Li, Xin He, and Jinchun Wang "Modeling and simulation of the beam steering unit", Proc. SPIE 9426, Optical Microlithography XXVIII, 942623 (18 March 2015); https://doi.org/10.1117/12.2084588

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