Dr. Xiaoping Li Profile

Dr. Xiaoping Li

at Huazhong Univ of Science and Technology

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Author

Publications (7)

Proceedings Article | 18 March 2015 Paper

Modeling and simulation of the beam steering unit

Jiayun Feng, Xiaoping Li, Xin He, Jinchun Wang

Proceedings Volume 9426, 942623 (2015) https://doi.org/10.1117/12.2084588

KEYWORDS: Spherical lenses, Beam steering, Stress analysis, Mathematical modeling, Modeling and simulation, Lithography, Beam delivery, Mechanics, Lithium, 3D modeling

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Proceedings Article | 31 March 2014 Paper

A temperature control algorithm of immersion liquid for immersion lithography

Junwei He, Xiaoping Li, Min Lei, Bing Chen, Jinchun Wang

Proceedings Volume 9052, 90522F (2014) https://doi.org/10.1117/12.2046080

KEYWORDS: Liquids, Control systems, Fuzzy logic, Immersion lithography, Temperature metrology, Sensors, Photonic integrated circuits, Water, Control systems design, Process control

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Proceedings Article | 21 November 2007 Paper

Nonlinear PI-control temperature control algorithm for projection lens

Xiaoping Li, Hongfei Nie, Bin Yu

Proceedings Volume 6724, 67241Q (2007) https://doi.org/10.1117/12.782953

KEYWORDS: Water, Control systems, Switches, Nonlinear control, Temperature metrology, Lithography, Detection and tracking algorithms, Optical lithography, Process control, Thallium

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Proceedings Article | 21 November 2007 Paper

Simulation on signal processing of focusing and leveling measurement system

Xiaoping Li, Feibiao Chen, Zhidan Li

Proceedings Volume 6724, 67241R (2007) https://doi.org/10.1117/12.782958

KEYWORDS: Semiconducting wafers, Signal processing, Sensors, Linear filtering, Lithography, Reflectivity, Modulators, Modulation, Signal detection, Polarization

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Proceedings Article | 16 February 2004 Paper

Vanadium dioxide nanomaterial for smart thermochromic glazing of windows

Xiaoping Li, Sihai Chen, Shuangbao Wang, Jianjun Lai, Changhong Chen, Xinjian Yi

Proceedings Volume 5648, (2004) https://doi.org/10.1117/12.581995

KEYWORDS: Vanadium, Sputter deposition, Annealing, Transition metals, Nanomaterials, Thin film coatings, Nanolithography, Metals, Nanostructures, Solar energy

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Proceedings Article | 8 September 1999 Paper

Computer simulation of optical coating deposition monitored by transmission turning point

Xiaohui Zhang, Weiming Zhu, Xiaoping Li, Qingming Chen

Proceedings Volume 3862, (1999) https://doi.org/10.1117/12.361097

KEYWORDS: Computer simulations, Optical coatings, Transmittance, Thin films, Thin film coatings, Refractive index, Computing systems, Nanolithography, Deposition processes, Structural design

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Proceedings Article | 8 September 1999 Paper

Thickness delicacy gene analysis of narrow interference bandpass filters

Weiming Zhu, Xiaohui Zhang, Xiaoping Li, Qingming Chen

Proceedings Volume 3862, (1999) https://doi.org/10.1117/12.361099

KEYWORDS: Transmittance, Bandpass filters, Error analysis, Wavelength division multiplexing, Coating, Manufacturing, Optics manufacturing, Electronic filtering, Lithium, Telecommunications

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Showing 5 of 7 publications

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