Development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL

Takumi Toida; Akihiro Suzuki; Naoya Uchiyama; Takashi Makinoshima; Masaaki Takasuka; Takashi Sato; Masatoshi Echigo

doi:10.1117/12.2085470

20 March 2015 Development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL

Takumi Toida, Akihiro Suzuki, Naoya Uchiyama, Takashi Makinoshima, Masaaki Takasuka, Takashi Sato, Masatoshi Echigo

Proceedings Volume 9425, Advances in Patterning Materials and Processes XXXII; 94251L (2015) https://doi.org/10.1117/12.2085470
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

In this paper, we report the development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL. The new xanthendiol derivatives were easily synthesized by the condensation of aldehydes and dihydroxyaromatic compounds. We found 13,13’-biphenyl-bis(13H-benzoxanthen-2,11-diol) was showed the good applicability to the raw material for the resist for EB/EUVL. The EB patterning result showed the resist containing xanthendiol derivative could resolve the 20 nm half-pitch pattern, and 15 nm half-pitch patterns were partially resolved.

Citation Download Citation

Takumi Toida, Akihiro Suzuki, Naoya Uchiyama, Takashi Makinoshima, Masaaki Takasuka, Takashi Sato, and Masatoshi Echigo "Development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL", Proc. SPIE 9425, Advances in Patterning Materials and Processes XXXII, 94251L (20 March 2015); https://doi.org/10.1117/12.2085470

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