Performance Of A KrF Excimer Laser Stepper

Roger W. McCleary; Paul J. Tompkins; Michael D. Dunn; Kenneth F. Walsh; John F. Conway; Ronald P. Mueller

doi:10.1117/12.968437

1 January 1988 Performance Of A KrF Excimer Laser Stepper

Roger W. McCleary, Paul J. Tompkins, Michael D. Dunn, Kenneth F. Walsh, John F. Conway, Ronald P. Mueller

Proceedings Volume 0922, Optical/Laser Microlithography; (1988) https://doi.org/10.1117/12.968437
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

Device design criteria of half micrometer linewidths have driven optical lithography to extend its imaging wavelengths into the deep ultraviolet region. Excimer lasers are the only source that produces the high spectral brightness required by projection lenses at these wavelengths. A spectral line narrowed KrF (2484 Angstrom) excimer laser and a new illuminator have been developed and integrated with current DSW Wafer Stepper® technology. The integration of these new features require the design of control subsystems to monitor and control parameters such as wavelength and temperature. Wavelength must be tuned and stabilized to optimize the resolution and distortion performance of the reduction lens. The effects of temperature and bandwidth are also important to lens performance criteria, for example astigmatism, distortion, and contrast. Acceptance results for an excimer stepper will be discussed with special emphasis on resolution capability, illumination uniformity, focus stability, and dose repeatability.

Citation Download Citation

Roger W. McCleary, Paul J. Tompkins, Michael D. Dunn, Kenneth F. Walsh, John F. Conway, and Ronald P. Mueller "Performance Of A KrF Excimer Laser Stepper", Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); https://doi.org/10.1117/12.968437

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available