6-DOF displacement and angle measurements using heterodyne laser encoder

Ssu-Wen Pan; Hung-Lin Hsieh; Wei-Cheng Wang

doi:10.1117/12.2024082

20 September 2013 6-DOF displacement and angle measurements using heterodyne laser encoder

Ssu-Wen Pan, Hung-Lin Hsieh, Wei-Cheng Wang

Proceedings Volume 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII; 881909 (2013) https://doi.org/10.1117/12.2024082
Event: SPIE NanoScience + Engineering, 2013, San Diego, California, United States

Abstract

In this research, a novel heterodyne laser encoder for 6-DOF displacement and angle measurements is proposed. The technique combines the advantages of heterodyne interferometry, grating shearing interferometry, and Michelson interferometry. When a heterodyne light beam with two orthogonally polarized directions is used to focus on a semi-transmission grating, two detection configurations for in-plane and out-of-plane will be obtained. By means of measuring the phase variations of the interfering signals from the moving grating, the in-plane displacement can be acquired. Besides, the out-of-plane displacement can be obtained by detecting the optical path difference between the reference beam and the reflection beam. Furthermore, 6-DOF displacement and angle information can be measured simultaneously by using the beam dividing method. According to the experimental results, the measurement resolution is about 2 nm. The experimental results show that our proposed method has the ability to measure 6-DOF displacement and angle information with high system stability. Comparing with other commercial measurement instructions, this laser encoder has the advantages of high resolution, high stability, and high flexibility.

Citation Download Citation

Ssu-Wen Pan, Hung-Lin Hsieh, and Wei-Cheng Wang "6-DOF displacement and angle measurements using heterodyne laser encoder", Proc. SPIE 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, 881909 (20 September 2013); https://doi.org/10.1117/12.2024082

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