A Non-Contact ED Sensor For Irterferometric End Gauge Calibration

L. S. Tanwar; P. C. Jain

doi:10.1117/12.947601

16 January 1989 A Non-Contact ED Sensor For Irterferometric End Gauge Calibration

L. S. Tanwar, P. C. Jain

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947601
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

A simple optical triangulation based electro-optical sensor with 0.01 µm resolution has been successfully used for the interferoretric calibration of 1m end gauge. Two independent illuminating and detecting arms were mounted together to gauge both the faces of the gauge alternately. The null photo-signals defined the gauge planes and the in-between displacement was measured by a laser interferometer. A precision of 0.25 μm was obtained which was limited by the mechanical vibration found to be present in the machine bed. The experimental set-up details, procedure adopted and the results arrived at are presented.

Citation Download Citation

L. S. Tanwar and P. C. Jain "A Non-Contact ED Sensor For Irterferometric End Gauge Calibration", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947601

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