Structure and optical properties of TiO2 thin films prepared by pulsed laser deposition

Anna Białous; Maria Gazda; Gerard Śliwiński

doi:10.1117/12.2013426

15 March 2013 Structure and optical properties of TiO₂ thin films prepared by pulsed laser deposition

Anna Białous, Maria Gazda, Gerard Śliwiński

Proceedings Volume 8770, 17th International School on Quantum Electronics: Laser Physics and Applications; 877008 (2013) https://doi.org/10.1117/12.2013426
Event: Seventeenth International School on Quantum Electronics: Laser Physics and Applications, 2012, Nessebar, Bulgaria

Abstract

Thin TiO₂ films prepared by pulsed laser deposition (PLD) in the O₂ gas ambient using the bulk metal Ti or pressed TiO₂ powder targets were characterized using spectroscopic methods. Films were deposited on SiO₂ (001) and SiO₂ glass substrates heated up to 300 °C. The deposition process was investigated at laser fluencies from the range of 1 – 3 J/cm² and at oxygen pressure of 0.1 – 3.2 Pa. The μ-Raman and X-ray diffraction (XRD) spectra of the TiO₂ films revealed consistently both the anatase and rutile crystalline phases and a strong dependence of the phase content ratio on target material and deposition conditions. The range of crystallite size determined from XRD bandwidths was between (2-30) nm and (6-14) nm for anatase and rutile, respectively. The film thickness values between 0.74 and 1.65 μm depending on the deposition time were obtained from the transmittance and ellipsometric measurements. Values of the band gap of 3.5-4.1 eV derived from absorption spectra were higher than that of 3.2 eV corresponding to anatase and this difference was ascribed to the relatively small size of the anatase crystallites and presence of rutile, too. The SEM images of films produced under similar conditions from Ti and TiO₂ targets revealed porous structures. The highest anatase content was observed for films deposited by ablation of the TiO₂ target at moderate laser fluencies below 2 J/cm² and at oxygen pressure around 1.9 Pa.

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Anna Białous, Maria Gazda, and Gerard Śliwiński "Structure and optical properties of TiO₂ thin films prepared by pulsed laser deposition", Proc. SPIE 8770, 17th International School on Quantum Electronics: Laser Physics and Applications, 877008 (15 March 2013); https://doi.org/10.1117/12.2013426

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