Preparation and properties of titanium oxide thin film by midfrequency alternative reactive magnetron sputtering technique

Yaqi Hou; Daming Zhuang; Daqing Zhao; Jihong Zhang; Chengbiao Wang

doi:10.1117/12.401717

3 October 2000 Preparation and properties of titanium oxide thin film by midfrequency alternative reactive magnetron sputtering technique

Yaqi Hou, Daming Zhuang, Daqing Zhao, Jihong Zhang, Chengbiao Wang

Author Affiliations +

Proceedings Volume 4220, Advanced Photonic Sensors: Technology and Applications; (2000) https://doi.org/10.1117/12.401717
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In this paper TiO₂ thin film was successfully prepared by mid-frequency alternative reactive magnetron sputtering technique with pure titanium target. Ellipsometry, AES, SEM, XRD and ultraviolet spectrophotometer were used to examine the thickness and refractive index, composition, surface morphology, microstructure and ultraviolet and visible absorption spectrum of the TiO₂ thin film, respectively. The effects of technological parameters on the properties of TiO₂ thin film were studied. The experimental results showed that the ratio of O to Ti in the thin film is very close to 2:1, which is almost independent of the oxygen partial pressure under the experiment flow rate range of oxygen in the work. The microstructure of TiO₂ thin film is mainly composed of anatase. The surface morphology of TiO₂ thin film is fine and dense. The optical properties of TiO₂ thin film are fairly good. Its transmittance is high up to 90%. The ultraviolet and visible absorption spectrum showed that the transmittance obviously decreased when oxygen flow rate was lowered from 10 sccm to 2 sccm.

Citation Download Citation

Yaqi Hou, Daming Zhuang, Daqing Zhao, Jihong Zhang, and Chengbiao Wang "Preparation and properties of titanium oxide thin film by midfrequency alternative reactive magnetron sputtering technique", Proc. SPIE 4220, Advanced Photonic Sensors: Technology and Applications, (3 October 2000); https://doi.org/10.1117/12.401717

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available