Paper
9 April 2013 Hot-embossing of microstructures on addition-curing polydimethylsiloxane films
Sindhu Vudayagiri, Liyun Yu, Suzan Hassouneh, Anne Ladegaard Skov
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Abstract
To our knowledge no known technologies or processes are commercially available for embossing microstructures and sub-micron structures on elastomers like silicones in large scale production of films. The predominantly used technologies to make micro-scale components for micro-fluidic devices and microstructures on PDMS elastomer are 1) reaction injection molding 2) UV lithography and 3) photolithography, which all are time-consuming and not suitable for large scale productions. A hot-embossing process to impart micro-scale corrugations on an addition curing vinyl terminated PDMS (polydimethyl siloxane) film, which is thermosetting elastomer, was established based on the existing and widely applied technology for thermoplasts. We focus on hot-embossing as it is one of the simplest, most costeffective and time saving methods for replicating structures for thermoplasts. Addition curing silicones are shown to possess the ability to capture and retain an imprint made on it 10-15 minutes after the gel-point at room temperature. This property is exploited in the hot-embossing technology.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sindhu Vudayagiri, Liyun Yu, Suzan Hassouneh, and Anne Ladegaard Skov "Hot-embossing of microstructures on addition-curing polydimethylsiloxane films", Proc. SPIE 8687, Electroactive Polymer Actuators and Devices (EAPAD) 2013, 86870S (9 April 2013); https://doi.org/10.1117/12.2009469
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KEYWORDS
Silicon

Polymers

Microscopes

Actuators

Coating

Liquids

Polymer thin films

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