Etch correction and OPC: a look at the current state and future of etch correction

Ian Stobert; Derren Dunn

doi:10.1117/12.2015000

29 March 2013 Etch correction and OPC: a look at the current state and future of etch correction

Ian Stobert, Derren Dunn

Proceedings Volume 8685, Advanced Etch Technology for Nanopatterning II; 868504 (2013) https://doi.org/10.1117/12.2015000
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Various forms of Optical Proximity Correction (OPC) have been employed for over twenty years to address local lithographic printing effects. As lithography modeling capabilities have improved, so too have the sophistication and complexity of OPC solutions. In the same time frame, there have been advances in etch modeling capabilities, but the complexity of the correction schemes used to address etch effects have lagged a few years behind lithographic OPC correction. In this paper we examine some of the challenges faced in etch modeling and correction. We describe some of the etch correction tools and techniques used in current mask tape out flows. Finally, we use the last few years of advances in OPC correction to predict what form etch correction will take going forward, both in EUV flows, and in traditional non-EUV OPC flows in the 10nm node and beyond.

Citation Download Citation

Ian Stobert and Derren Dunn "Etch correction and OPC: a look at the current state and future of etch correction", Proc. SPIE 8685, Advanced Etch Technology for Nanopatterning II, 868504 (29 March 2013); https://doi.org/10.1117/12.2015000

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available