Illumination pupilgram control using an intelligent illuminator

Noriyuki Hirayanagi; Yasushi Mizuno; Masakazu Mori; Naonori Kita; Ryota Matsui; Tomoyuki Matsuyama

doi:10.1117/12.2011077

12 April 2013 Illumination pupilgram control using an intelligent illuminator

Noriyuki Hirayanagi, Yasushi Mizuno, Masakazu Mori, Naonori Kita, Ryota Matsui, Tomoyuki Matsuyama

Proceedings Volume 8683, Optical Microlithography XXVI; 86830D (2013) https://doi.org/10.1117/12.2011077
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Nikon’s Intelligent Illuminator, a freeform pupilgram generator, realizes a high flexibility for pupilgram control by using more than 10,000 degrees-of-freedom for pupilgram adjustment. In this work, an Intelligent Illuminator was integrated into an ArF scanner, the Nikon NSR-S621D. We demonstrate the pupilgram setting accuracy by direct correlation between on-body measured pupilgram and desired target pupilgram. We show that the Intelligent Illuminator is used for fine tuning of the pupilgram to match optical proximity effect (OPE) characteristics. We experimentally confirmed that a global source optimization software realized an improvement of lithographic process window without changing OPE characteristics by using optimized pupilgram made by Intelligent Illuminator.

Citation Download Citation

Noriyuki Hirayanagi, Yasushi Mizuno, Masakazu Mori, Naonori Kita, Ryota Matsui, and Tomoyuki Matsuyama "Illumination pupilgram control using an intelligent illuminator", Proc. SPIE 8683, Optical Microlithography XXVI, 86830D (12 April 2013); https://doi.org/10.1117/12.2011077

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