Computational simulation of block copolymer directed self-assembly in small topographical guiding templates

He Yi; Azat Latypov; H.-S. Philip Wong

doi:10.1117/12.2011264

26 March 2013 Computational simulation of block copolymer directed self-assembly in small topographical guiding templates

He Yi, Azat Latypov, H.-S. Philip Wong

Author Affiliations +

Proceedings Volume 8680, Alternative Lithographic Technologies V; 86801L (2013) https://doi.org/10.1117/12.2011264
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Directed self-assembly (DSA) of block copolymers (BCP) has attracted significant interest due to its promising potential as the next generation lithography candidate. In this paper we used Self-Consistent-Field-Theory (SCFT) to computationally simulate the equilibrium behavior of self-assembly inside a confinement well, which is also known as graphoepitaxy. More specifically, we studied the DSA of cylinder-forming block copolymers for contact hole/via patterning, mainly focusing on 1-hole DSA pattern inside confinement well. The SCFT simulation results of parametric studies for confinement well sizes ranging from 50nm to 90nm, different polymer film thicknesses and a range of the wall/substrate affinity parameter values, are presented, as well as verified by experiments.

Citation Download Citation

He Yi, Azat Latypov, and H.-S. Philip Wong "Computational simulation of block copolymer directed self-assembly in small topographical guiding templates", Proc. SPIE 8680, Alternative Lithographic Technologies V, 86801L (26 March 2013); https://doi.org/10.1117/12.2011264

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