MEMS accelerometers utilizing resonant microcantilevers with interrogated single-mode waveguides and Bragg gratings

L. G. Carpenter; C. Holmes; J. C Gates; P. G. R. Smith

doi:10.1117/12.2004418

15 March 2013 MEMS accelerometers utilizing resonant microcantilevers with interrogated single-mode waveguides and Bragg gratings

L. G. Carpenter, C. Holmes, J. C Gates, P. G. R. Smith

Author Affiliations +

Proceedings Volume 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII; 86140K (2013) https://doi.org/10.1117/12.2004418
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

We have demonstrated two monolithically integrated Bragg grating based accelerometers, both with the optical path and mechanical structure being made from the same substrate. The unique fabrication techniques, Direct UV Writing and precision dicing, used to create the glass microcantilevers are discussed. We show experimental results from two different Bragg grating based interrogation systems, one utilizing a single Gaussian apodized Bragg grating and the other utilizes two spectrally matched Bragg gratings forming a Fabry-Pérot interferometer. Sinusoidal accelerations were applied to both devices and their sensitivities were found to be 0.67±0.035 mV/g and 14.0±0.44 mV/g for the single Bragg grating and Fabry-Pérot interferometer respectively.

Citation Download Citation

L. G. Carpenter, C. Holmes, J. C Gates, and P. G. R. Smith "MEMS accelerometers utilizing resonant microcantilevers with interrogated single-mode waveguides and Bragg gratings", Proc. SPIE 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII, 86140K (15 March 2013); https://doi.org/10.1117/12.2004418

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