Resist process optimization for further defect reduction

Keiichi Tanaka; Tomohiro Iseki; Hiroshi Marumoto; Koji Takayanagi; Yuichi Yoshida; Ryouichi Uemura; Kosuke Yoshihara

doi:10.1117/12.915813

20 March 2012 Resist process optimization for further defect reduction

Keiichi Tanaka, Tomohiro Iseki, Hiroshi Marumoto, Koji Takayanagi, Yuichi Yoshida, Ryouichi Uemura, Kosuke Yoshihara

Proceedings Volume 8325, Advances in Resist Materials and Processing Technology XXIX; 83252L (2012) https://doi.org/10.1117/12.915813
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

Defect reduction has become one of the most important technical challenges in device mass-production. Knowing that resist processing on a clean track strongly impacts defect formation in many cases, we have been trying to improve the track process to enhance customer yield. For example, residual type defect and pattern collapse are strongly related to process parameters in developer, and we have reported new develop and rinse methods in the previous papers. Also, we have reported the optimization method of filtration condition to reduce bridge type defects, which are mainly caused by foreign substances such as gels in resist. Even though we have contributed resist caused defect reduction in past studies, defect reduction requirements continue to be very important. In this paper, we will introduce further process improvements in terms of resist defect reduction, including the latest experimental data.

Citation Download Citation

Keiichi Tanaka, Tomohiro Iseki, Hiroshi Marumoto, Koji Takayanagi, Yuichi Yoshida, Ryouichi Uemura, and Kosuke Yoshihara "Resist process optimization for further defect reduction", Proc. SPIE 8325, Advances in Resist Materials and Processing Technology XXIX, 83252L (20 March 2012); https://doi.org/10.1117/12.915813

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available