Shared shuttles for integrated silicon optoelectronics

Tom Baehr-Jones; Ran Ding; Ali Ayazi; Thierry Pinguet; Matt Streshinsky; Nick Harris; Jing Li; Li He; Mike Gould; Yi Zhang; Andy Eu-Jin Lim; Tsung-Yang Liow; Selin Hwee-Gee Teo; Guo-Qiang Lo; Stewart Ocheltree; Craig Hill; Andrew Pomerene; Peter De Dobbelaere; Attila Mekis; Michael Hochberg

doi:10.1117/12.913096

15 February 2012 Shared shuttles for integrated silicon optoelectronics

Tom Baehr-Jones, Ran Ding, Ali Ayazi, Thierry Pinguet, Matt Streshinsky, Nick Harris, Jing Li, Li He, Mike Gould, Yi Zhang, Andy Eu-Jin Lim, Tsung-Yang Liow, Selin Hwee-Gee Teo, Guo-Qiang Lo, Stewart Ocheltree, Craig Hill, Andrew Pomerene, Peter De Dobbelaere, Attila Mekis, Michael Hochberg

Author Affiliations +

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520G (2012) https://doi.org/10.1117/12.913096
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Shared shuttle runs are an important factor of the microelectronics business ecosystem, allowing fabless semiconductor companies to access advanced processes and supporting the development of new tools and processes. We report on the creation and progress of a shared shuttle program for access to advanced silicon photonics optoelectronic platforms that we expect will create a similar environment for the field of integrated photonics.

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Tom Baehr-Jones, Ran Ding, Ali Ayazi, Thierry Pinguet, Matt Streshinsky, Nick Harris, Jing Li, Li He, Mike Gould, Yi Zhang, Andy Eu-Jin Lim, Tsung-Yang Liow, Selin Hwee-Gee Teo, Guo-Qiang Lo, Stewart Ocheltree, Craig Hill, Andrew Pomerene, Peter De Dobbelaere, Attila Mekis, and Michael Hochberg "Shared shuttles for integrated silicon optoelectronics", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520G (15 February 2012); https://doi.org/10.1117/12.913096

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