Exposure controlled projection lithography for microlens fabrication

Amit S. Jariwala; Robert E. Schwerzel; Harold A. Nikoue; David W. Rosen

doi:10.1117/12.909087

14 February 2012 Exposure controlled projection lithography for microlens fabrication

Amit S. Jariwala, Robert E. Schwerzel, Harold A. Nikoue, David W. Rosen

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 824917 (2012) https://doi.org/10.1117/12.909087
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

An Exposure Controlled Projection Lithography (ECPL) process with the ability to fabricate microlenses on transparent substrates is presented. This process (also referred to as maskless lithography) can be used to create polymer microlenses on flat or curved substrates without involving hard tooling. Incident radiation, patterned by a dynamic mask, passes through a transparent substrate to cure photopolymer resin that grows progressively from the substrate surface. A process planning algorithm which incorporates the effects of optical aberrations present in the ECPL system and photopolymer's response to irradiation is presented. An interferometric process monitoring system is also presented which can be used to control the process in real time. Samples of micro optical elements fabricated on flat and non-planar substrates using the ECPL system are also presented, which demonstrate the wide range of fabrication capability of our ECPL process.

Citation Download Citation

Amit S. Jariwala, Robert E. Schwerzel, Harold A. Nikoue, and David W. Rosen "Exposure controlled projection lithography for microlens fabrication", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 824917 (14 February 2012); https://doi.org/10.1117/12.909087

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available