Average power scaling of UV excimer lasers drives flat panel display and lidar applications

Ludolf Herbst; Ralph F. Delmdahl; Rainer Paetzel

doi:10.1117/12.906687

7 February 2012 Average power scaling of UV excimer lasers drives flat panel display and lidar applications

Ludolf Herbst, Ralph F. Delmdahl, Rainer Paetzel

Proceedings Volume 8238, High Energy/Average Power Lasers and Intense Beam Applications VI; Atmospheric and Oceanic Propagation of Electromagnetic Waves VI; 82380A (2012) https://doi.org/10.1117/12.906687
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

Average power scaling of 308nm excimer lasers has followed an evolutionary path over the last two decades driven by diverse industrial UV laser microprocessing markets. Recently, a new dual-oscillator and beam management concept for high-average power upscaling of excimer lasers has been realized, for the first time enabling as much as 1.2kW of stabilized UV-laser average output power at a UV wavelength of 308nm. The new dual-oscillator concept enables low temperature polysilicon (LTPS) fabrication to be extended to generation six glass substrates. This is essential in terms of a more economic high-volume manufacturing of flat panel displays for the soaring smartphone and tablet PC markets. Similarly, the cost-effective production of flexible displays is driven by 308nm excimer laser power scaling. Flexible displays have enormous commercial potential and can largely use the same production equipment as is used for rigid display manufacturing. Moreover, higher average output power of 308nm excimer lasers aids reducing measurement time and improving the signal-to-noise ratio in the worldwide network of high altitude Raman lidar stations. The availability of kW-class 308nm excimer lasers has the potential to take LIDAR backscattering signal strength and achievable altitude to new levels.

Citation Download Citation

Ludolf Herbst, Ralph F. Delmdahl, and Rainer Paetzel "Average power scaling of UV excimer lasers drives flat panel display and lidar applications", Proc. SPIE 8238, High Energy/Average Power Lasers and Intense Beam Applications VI; Atmospheric and Oceanic Propagation of Electromagnetic Waves VI, 82380A (7 February 2012); https://doi.org/10.1117/12.906687

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KEYWORDS

Excimer lasers

Ultraviolet radiation

LIDAR

Laser applications

Raman spectroscopy

Annealing

Flat panel displays

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