Isara 400 ultra-precision CMM

H. A. M. Spaan; I. Widdershoven

doi:10.1117/12.902237

30 September 2011 Isara 400 ultra-precision CMM

H. A. M. Spaan, I. Widdershoven

Proceedings Volume 8169, Optical Fabrication, Testing, and Metrology IV; 81690T (2011) https://doi.org/10.1117/12.902237
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

This paper presents the realization of the Isara 400 ultra-precision 3D coordinate measuring machine, which features a measuring volume of 400 × 400 × 100 mm and a traceable measurement uncertainty better than 50 nm. In order to achieve these challenging specifications, specific calibration strategies need to be applied, such as the calibration of the system's mirror table. In addition, a newly developed ultra-precision tactile probe system is described, featuring a probe tip radius of 35 μm; results of the 3D sensitivity calibration of this probe are presented. Finally, results are presented measuring a full hemisphere in 3D of a SiN ultra precision master ball, resulting in a repeatability of 7.9 nm rms.

Citation Download Citation

H. A. M. Spaan and I. Widdershoven "Isara 400 ultra-precision CMM", Proc. SPIE 8169, Optical Fabrication, Testing, and Metrology IV, 81690T (30 September 2011); https://doi.org/10.1117/12.902237

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available