Metrology for spatial interferometry III

Yekta Gursel

doi:10.1117/12.255096

12 October 1996 Metrology for spatial interferometry III

Yekta Gursel

Proceedings Volume 2807, Space Telescopes and Instruments IV; (1996) https://doi.org/10.1117/12.255096
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Very high resolution spatial interferometry requires picometer level 1D metrology, surface metrology and 3D metrology. The absolute distance measurements with accuracies of only 1 part in a million are required due to the careful design of spacecraft like the proposed Stellar Interferometry Mission, carrying high resolution stellar interferometers. An absolute calibration system for the surface gauge described in a previous paper is demonstrated. A self-calibrating absolute metrology system with a repeatability of 2 microns rms over a one-way distance of a meter is demonstrated. The accuracy calibration of this gauge is in progress. An auto-aligning, 3D metrology gauge is constructed using the sub-picometer linear metrology gauge described in earlier papers. Initial test results from this demonstration are presented.

Citation Download Citation

Yekta Gursel "Metrology for spatial interferometry III", Proc. SPIE 2807, Space Telescopes and Instruments IV, (12 October 1996); https://doi.org/10.1117/12.255096

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