Technology development towards a generic InP-based photonic-integration foundry

F. M. Soares; K. Janiak; R. G. Broeke; N. Grote

doi:10.1117/12.892126

26 July 2011 Technology development towards a generic InP-based photonic-integration foundry

F. M. Soares, K. Janiak, R. G. Broeke, N. Grote

Proceedings Volume 8001, International Conference on Applications of Optics and Photonics; 800111 (2011) https://doi.org/10.1117/12.892126
Event: International Conference on Applications of Optics and Photonics, 2011, Braga, Portugal

Abstract

The main goal of this work is to create a generic foundry service that allows outside users (i.e., universities and small- and-medium enterprises) that do not have fabrication facilities to obtain their own custom-made InP-based photonic-integrated chips (or ASPIC, application-specific photonic-integrated circuits, similar to ASIC in electronics). In this approach, the foundry supplies the user with the cross-section of the interconnect waveguide structure, and the mask layout dimensions and performance of several pre-defined- and wellcharacterized building blocks (BB) such as photodiodes, phase modulators, and spot-size converters (for lowloss fiber-chip coupling). Using this information, the user can generate a mask layout for the foundry by placing the building blocks onto his layout canvas and interconnecting them with the interconnect waveguides. Furthermore, since the material cross-section of the interconnect waveguide is known, the user can design, simulate, and include a mask layout for a desired passive devices such as MMIs, and AWGs, which can subsequently be fabricated at the foundry. We describe the technology development towards obtaining a versatile generic-foundry platform which gives users the freedom to design a large variety of photonic-integrated- devices and circuits. Our generic-foundry technology is based on the fabrication process of our commercially-available high-speed- photodiodes and balanced photodiodes (high-frequency response up to and beyond 100 GHz). We have expanded this fabrication process to include a total of three different types of interconnecting waveguides: a low-contrast-, a medium-contrast, and a high-contrast waveguide, as well as transition BBs to couple light from one waveguide type into the other.

Citation Download Citation

F. M. Soares, K. Janiak, R. G. Broeke, and N. Grote "Technology development towards a generic InP-based photonic-integration foundry", Proc. SPIE 8001, International Conference on Applications of Optics and Photonics, 800111 (26 July 2011); https://doi.org/10.1117/12.892126

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