Monolithic Integration Of Optical Sources And Detectors

James L. Merz

doi:10.1117/12.959187

25 February 1981 Monolithic Integration Of Optical Sources And Detectors

James L. Merz

Proceedings Volume 0239, Guided Wave Optical and Surface Acoustic Wave Devices: Systems and Applications; (1981) https://doi.org/10.1117/12.959187
Event: 24th Annual Technical Symposium, 1980, San Diego, United States

Abstract

A review is given of recent progress in the development of integrated optical circuits involving the GaAs/A/GaAs double heterostructure system. Various devices utilizing period-ic corrugations or gratings are described briefly, whereas alternate attempts to fabricate optical circuits by chemical etching are discussed in more detail. The current trend to explore other III-V compounds is considered, with emphasis on the quaternary system InGaAsP. Recent advances in processing techniques suitable for optical integration, such as reactive-ion etching, laser and electron-beam processing, and the formation of ring lasers, are described, as well as the trend towards integration of optical and electronic devices.

Citation Download Citation

James L. Merz "Monolithic Integration Of Optical Sources And Detectors", Proc. SPIE 0239, Guided Wave Optical and Surface Acoustic Wave Devices: Systems and Applications, (25 February 1981); https://doi.org/10.1117/12.959187

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