Performance of a bilinear photoresist model

Anatoly Burov; Min Shi; Jiang Yan; Wenfeng Sun

doi:10.1117/12.879369

5 April 2011 Performance of a bilinear photoresist model

Anatoly Burov, Min Shi, Jiang Yan, Wenfeng Sun

Proceedings Volume 7973, Optical Microlithography XXIV; 79732V (2011) https://doi.org/10.1117/12.879369
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

A bilinear photoresist model extends the approach of a convolution kernel-style process models to include second-order effects. Using effective acid concentration after post-exposure bake as the latent image we approximate the reactiondiffusion operator as a second order Volterra series. The series expansion is carried out for a calibrated photoresist model. Both the linear kernel and the Bilinear Resist Transfer Function (BRTF) are estimated at the same time using a set of pre-computed training images. The linear kernels of the Volterra series are found to have a Gaussian behavior, while the shape of BRTF appears to vary greatly depending on exact details of photoresist composition. Accuracy of the estimated photoresist operator is studied using process window matching at multiple sets of optical conditions. The estimated operator is applied to a set of validation aerial images and the resultant CD values are compared against full photoresist simulation. The bilinear model performance is found to be within 1 nm of the full photoresist model across the full range of dose and focus values.

Citation Download Citation

Anatoly Burov, Min Shi, Jiang Yan, and Wenfeng Sun "Performance of a bilinear photoresist model", Proc. SPIE 7973, Optical Microlithography XXIV, 79732V (5 April 2011); https://doi.org/10.1117/12.879369

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available