Nanoprocessing of glass and PMMA by means of near-infrared sub-15 femtosecond laser pulses

Huijing Zhang; Martin Straub; Karsten König; Maziar Afshar; Dara Feili; Helmut Seidel

doi:10.1117/12.872854

21 February 2011 Nanoprocessing of glass and PMMA by means of near-infrared sub-15 femtosecond laser pulses

Huijing Zhang, Martin Straub, Karsten König, Maziar Afshar, Dara Feili, Helmut Seidel

Proceedings Volume 7921, Laser-based Micro- and Nanopackaging and Assembly V; 79210L (2011) https://doi.org/10.1117/12.872854
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

A near infrared sub-15 femtosecond laser scanning microscope was employed for structuring of bulk colored glass and polymethylmethacrylate (PMMA). The 400-mW Ti-Sapphire laser operates at 85 MHz with an M-shaped emission spectrum with maxima at 770 nm and 827 nm. Using a high numerical aperture objective light intensity of about 7 TW/cm² at the focal plane can be reached. For PMMA a mean power of less than 17 mW, which corresponds to a pulse energy of 0.2 nJ, was sufficient for ablating material. Holes of a diameter of less than 170 nm were produced. Two-photon fluorescence measurements, which can be performed with the same microscope, reveal an extension of the focus length in the specimen, which is most likely caused by self-focusing effects. By applying the same power, the refractive index of the glass could be changed. Islands at the glass surface of a size of less than 100 nm have been produced.

Citation Download Citation

Huijing Zhang, Martin Straub, Karsten König, Maziar Afshar, Dara Feili, and Helmut Seidel "Nanoprocessing of glass and PMMA by means of near-infrared sub-15 femtosecond laser pulses", Proc. SPIE 7921, Laser-based Micro- and Nanopackaging and Assembly V, 79210L (21 February 2011); https://doi.org/10.1117/12.872854

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