A non-destructive metrology solution for detailed measurements of imprint templates and media

Jeffrey Roberts; Linlin Hu; Torbjörn Eriksson; Kristian Thulin; Babak Heidari

doi:10.1117/12.833465

29 September 2009 A non-destructive metrology solution for detailed measurements of imprint templates and media

Jeffrey Roberts, Linlin Hu, Torbjörn Eriksson, Kristian Thulin, Babak Heidari

Proceedings Volume 7488, Photomask Technology 2009; 74881Z (2009) https://doi.org/10.1117/12.833465
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

This study investigates a non-destructive optical metrology technique, that furnishes measurement solutions for hard drive discrete track recording (DTR) and bit patterned media (BPM) templates and imprints. From the measurement and analysis of polarized reflectance and transmittance, feature height and profile of DTR and BPM templates and imprints, as well as residual layer thickness of imprints, are accurately determined, and uniformity maps of these parameters are produced in a fraction of a minute. Simulations of theoretical polarized reflectance and transmittance, relating to next generation structures, demonstrate that the optical metrology solution has capability for future products.

Citation Download Citation

Jeffrey Roberts, Linlin Hu, Torbjörn Eriksson, Kristian Thulin, and Babak Heidari "A non-destructive metrology solution for detailed measurements of imprint templates and media", Proc. SPIE 7488, Photomask Technology 2009, 74881Z (29 September 2009); https://doi.org/10.1117/12.833465

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