Quantitative measurement of optical surfaces using an improved knife edge

Hongwei Jing; Wei Yang; Bin Fan; Yongjian Wan; Shibin Wu; Fan Wu; Tianquan Fan

doi:10.1117/12.828620

20 May 2009 Quantitative measurement of optical surfaces using an improved knife edge

Hongwei Jing, Wei Yang, Bin Fan, Yongjian Wan, Shibin Wu, Fan Wu, Tianquan Fan

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72830W (2009) https://doi.org/10.1117/12.828620
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

One of the oldest techniques for sensing optical abberations is Foucault knife edge test. Qualitative properties of knife edge test have been utilized over the past 150 years to assess the quality of an optic or optical system. Much work and analysis have been performed since Foucault,but no satisfactory results have been found. This paper describes a method that upgrades the knife edge tester from a qualitative tester to a quantitative tester.Firstly,the traditional knife edge tester is upgraded to an improved one enabling the knife to cut the focus from horizontal direction and vertical direction.Secondly,the 2 sets of shadows were integrated to form complete mirror shadows.Finally,a mathematical model is established to quantitatively evaluate the surface error from the shadows. An experiment has been done using the method. The calculated deviations of the optical surface are compared with the results measured by ZYGO interferometer. Two measurement results show resemblance.

Citation Download Citation

Hongwei Jing, Wei Yang, Bin Fan, Yongjian Wan, Shibin Wu, Fan Wu, and Tianquan Fan "Quantitative measurement of optical surfaces using an improved knife edge", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830W (20 May 2009); https://doi.org/10.1117/12.828620

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