Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication

Hideaki Sakurai; Masatoshi Terayama; Mari Sakai; Masamitsu Itoh; Osamu Ikenaga; Hideo Funakoshi; Norifumi Sato; Kenji Nakamizo; Masato Nomura; Yoshihiko Saito; Junji Nakao; Naoya Hayashi

doi:10.1117/12.801424

17 October 2008 Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication

Hideaki Sakurai, Masatoshi Terayama, Mari Sakai, Masamitsu Itoh, Osamu Ikenaga, Hideo Funakoshi, Norifumi Sato, Kenji Nakamizo, Masato Nomura, Yoshihiko Saito, Junji Nakao, Naoya Hayashi

Author Affiliations +

Proceedings Volume 7122, Photomask Technology 2008; 71220D (2008) https://doi.org/10.1117/12.801424
Event: SPIE Photomask Technology, 2008, Monterey, California, United States

Abstract

Development process for 3x nm node devices and beyond is becoming a great issue in mask fabrication. The following items, such as uniformity, repeatability, loading effect and defect must be improved. To evolve the development process, TEL, DNP Omron and Toshiba have been jointly developed next generation equipment which is called "Second-generation PGSD (Gen.2)". In this paper, PGSD Gen.2 concept is introduced and its performance is reported.

Citation Download Citation

Hideaki Sakurai, Masatoshi Terayama, Mari Sakai, Masamitsu Itoh, Osamu Ikenaga, Hideo Funakoshi, Norifumi Sato, Kenji Nakamizo, Masato Nomura, Yoshihiko Saito, Junji Nakao, and Naoya Hayashi "Study of second-generation Proximity Gap Suction Development System (PGSD-II) for mask fabrication", Proc. SPIE 7122, Photomask Technology 2008, 71220D (17 October 2008); https://doi.org/10.1117/12.801424

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available