Pulsed laser ablation of polymers for display applications

James E. A. Pedder; Andrew S. Holmes; Heather J. Booth

doi:10.1117/12.778180

26 February 2008 Pulsed laser ablation of polymers for display applications

James E. A. Pedder, Andrew S. Holmes, Heather J. Booth

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 68790S (2008) https://doi.org/10.1117/12.778180
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Laser micromachining by ablation is a well established technique used for the production of 2.5D and 3D features in a wide variety of materials. The fabrication of stepped, multi-level, structures can be achieved using a number of binary mask projection techniques using excimer lasers. Alternatively, direct-writing of complex 2.5D features can easily be achieved with solid-state lasers. Excimer laser ablation using half-tone masks allows almost continuous surface relief and the generation of features with low surface roughness. We have developed techniques to create large arrays of repeating micro-optical structures on polymer substrates. Here, we show our recent developments in laser structuring with the combination of half-tone and binary mask techniques.

Citation Download Citation

James E. A. Pedder, Andrew S. Holmes, and Heather J. Booth "Pulsed laser ablation of polymers for display applications", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790S (26 February 2008); https://doi.org/10.1117/12.778180

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available