Laser micromachining of high-density optical structures on large substrates

Karl L. Boehlen; Ines Benigna Stassen Boehlen

doi:10.1117/12.537827

15 July 2004 Laser micromachining of high-density optical structures on large substrates

Karl L. Boehlen, Ines Benigna Stassen Boehlen

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.537827
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

A new laser mask projection technique, Synchronised Image Scanning (SIS), has been developed for the efficient fabrication of dense arrays of repeating microstructures on large area substrates. This paper details the technique and provides specific examples of the type of structures that can be produced. SIS is a laser micro-machining technique where the information for the ablation of a specific 3D feature is stored as a linear array on a chrome-on-quartz mask. The feature is then written by synchronised motion and laser firing, such that the firing frequency of the laser corresponds to the spatial pitch of the features. This requires highly accurate laser triggering with low-jitter signals, and accurate stages with high resolution encoders. An add-in for CAD software has been developed to generate the mask pattern efficiently and error-free, using the 3D designs. SIS allows for major improvements in the accuracy and speed with which 3D patterns can be created over large areas by laser ablation. Feature sizes down to a few microns can be produced with excellent surface quality. Large areas of microstructures have wide ranging applications in many areas. One example is the machining of large polymer master panels for electroforming to produce moulds for replication of display enhancement films.

Citation Download Citation

Karl L. Boehlen and Ines Benigna Stassen Boehlen "Laser micromachining of high-density optical structures on large substrates", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.537827

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