Analysis of stray light in most complex situations

Jean-Claude Perrin

doi:10.1117/12.734595

18 September 2007 Analysis of stray light in most complex situations

Jean-Claude Perrin

Proceedings Volume 6667, Current Developments in Lens Design and Optical Engineering VIII; 66670J (2007) https://doi.org/10.1117/12.734595
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

To analyze ghost effects in optical systems including decentred coatings with thickness variations, polarized light and interactions with object and image planes is a difficult task. Thanks to a battery of tools especially developed in the last ten years and applied to many different situations, it is possible to do such jobs in a quick and elegant manner. As an example, we shall consider optical relay lenses used for photolithography. The object plane is the reticle; The image plane is the wafer.

Citation Download Citation

Jean-Claude Perrin "Analysis of stray light in most complex situations", Proc. SPIE 6667, Current Developments in Lens Design and Optical Engineering VIII, 66670J (18 September 2007); https://doi.org/10.1117/12.734595

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