Thin-film silicon position sensors made using laser scribing

L. Urbina; J. J. Gandía; J. Cárabe; S. Lauzurica; C. Molpeceres; J. L. Ocaña

doi:10.1117/12.662685

22 April 2006 Thin-film silicon position sensors made using laser scribing

L. Urbina, J. J. Gandía, J. Cárabe, S. Lauzurica, C. Molpeceres, J. L. Ocaña

Proceedings Volume 6189, Optical Sensing II; 61890K (2006) https://doi.org/10.1117/12.662685
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Position detectors are useful for alignment and orientation sensing. Charge-coupled devices (CCDs) are used in small-area systems. Four-quadrant diodes are a low-cost, limited-accuracy alternative. In cases where either large area or reliability under harsh conditions are required, thin-film-silicon sensors may become the only reasonable choice. The paper proposes a simple structure for making such devices, describes the first experiments and discusses the key issues faced, with emphasis on laser scribing.

Citation Download Citation

L. Urbina, J. J. Gandía, J. Cárabe, S. Lauzurica, C. Molpeceres, and J. L. Ocaña "Thin-film silicon position sensors made using laser scribing", Proc. SPIE 6189, Optical Sensing II, 61890K (22 April 2006); https://doi.org/10.1117/12.662685

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available