Research on technique of grating nanometer-subdivision

Jin Xu; Xiangqun Cao; Xuxiang Ni; Zukang Lu

doi:10.1117/12.676406

19 May 2006 Research on technique of grating nanometer-subdivision

Jin Xu, Xiangqun Cao, Xuxiang Ni, Zukang Lu

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61501C (2006) https://doi.org/10.1117/12.676406
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

In this paper, a new system and method of grating nanometer metrology are introduced. The system is made up of light resource, metrological grating, object lens of microscope, electronic-ocular based on CMOS image sensor, and personal computer. Firstly, metrological grating were irradiated by light resource. Secondly, the grating images on electronic-ocular based on CMOS image sensor. Thirdly, electronic-ocular gained the image and trans to the PC by USB. After gained the image, computer converts it to bitmap and processing. There are three steps of the grating subdivision. Firstly, digital image processing is used to set a soft-reticle over the bitmap. Position of the origin in a period is the result we want, and system resolution depends on pixels in a period. Secondly, pixels on gratings border will be calculated, analyzing any pixel coordinate and value, and using statistics and linear function to calculate more precision of the position of border. And thirdly, multi-origins and average effect of grating are used. In this system, higher measuring resolution based on higher quality gratings and clearer imaging system are obtained, and more pixels are processed in arithmetic. In the experiment system, period of grating is 0.02mm, object lens 40~60X, CMOS image sensor pixels, and the resolution of subdivision. Many experiment data have been gained by using this system, and all measuring data are displayed on the screen, in real-time, and automatically recorded in disk. At last, analyzing these data, conclusion of the measuring resolution and precision accuracy is drawn.

Citation Download Citation

Jin Xu, Xiangqun Cao, Xuxiang Ni, and Zukang Lu "Research on technique of grating nanometer-subdivision", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61501C (19 May 2006); https://doi.org/10.1117/12.676406

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

CMOS sensors

Metrology

Microscopes

Reticles

Digital image processing

Image resolution

Imaging systems

Show All Keywords

Keywords/Phrases

Search In:

Publication Years