Research on parameter of grating digital subdivision

Xiangqun Cao; Jin Xu; Tianjin Tang; Zukang Lu

doi:10.1117/12.676407

19 May 2006 Research on parameter of grating digital subdivision

Xiangqun Cao, Jin Xu, Tianjin Tang, Zukang Lu

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 615019 (2006) https://doi.org/10.1117/12.676407
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

The grating digital subdivision system in this paper is made up of light resource, metrological grating, object lens of microscope, electronic-eyepiece based on CMOS image sensor, and personal computer. In this paper, we introduce the experiment system that use different object lens and electronic eyepiece, for example, object lens with different NA, electronic eyepiece with different CMOS image sensors and different resolution. We write a digital subdivide software for the system, in experiment, we use only one subdivide software and image collection software. In the paper, we analyze the experiment with theory and practice, which use the same software but different hardware. We used the different object lens with 5X, 10X, 20X, 40X, and used the different CMOS image sensor resolution with 320×240,640×480,1280×1024,1600×1200. After these experiment, we do analysis the data, all these practice will take a reference to everyone who research on grating digital subdivision.

Citation Download Citation

Xiangqun Cao, Jin Xu, Tianjin Tang, and Zukang Lu "Research on parameter of grating digital subdivision", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615019 (19 May 2006); https://doi.org/10.1117/12.676407

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