On the influence of gauge block roughness characteristic and surface treatment on length calibration by optical interferometry

Jennifer E. Decker; Peter Franke; Gerhard Boensch

doi:10.1117/12.614402

18 August 2005 On the influence of gauge block roughness characteristic and surface treatment on length calibration by optical interferometry

Jennifer E. Decker, Peter Franke, Gerhard Boensch

Author Affiliations +

Proceedings Volume 5879, Recent Developments in Traceable Dimensional Measurements III; 587907 (2005) https://doi.org/10.1117/12.614402
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The influence of gauge block preparation on their optical reflection properties is investigated. Results of length calibration experiments by optical interferometry performed on 9 steel gauge blocks having a wide range of surface roughness characteristics and pre-treatment are described. These data demonstrate that different conventional cleaning procedures and the use of appropriate wringing fluids have negligible effect on the reflection properties of the measurement surfaces of gauge blocks and platens.

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Jennifer E. Decker, Peter Franke, and Gerhard Boensch "On the influence of gauge block roughness characteristic and surface treatment on length calibration by optical interferometry", Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 587907 (18 August 2005); https://doi.org/10.1117/12.614402

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