Analysis of the structures and characteristics for an InP-based micromechanical tunable filter

Bin Chen; Zhen Zhou; Yongqing Huang; Xiaomin Ren

doi:10.1117/12.578453

30 December 2004 Analysis of the structures and characteristics for an InP-based micromechanical tunable filter

Bin Chen, Zhen Zhou, Yongqing Huang, Xiaomin Ren

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.578453
Event: Photonics Asia, 2004, Beijing, China

Abstract

In this letter,a InP-based micromechanical tuneable filter by electrostatic actuation is introduced. Through simulation of the DBR reflectance spectra and the F-P cavity transimission spectra,the filter performance is studied. By means of finite element method,the tunning characteristics of the filters based on several typical micromechanical structures are presented. The dynamical behavior of the top mirror is investigated.In addition,the flatness of the top mirror are compared among these structures. It would be valuable reference for InP-based micromechanical F-P cavity device design and optimization.

Citation Download Citation

Bin Chen, Zhen Zhou, Yongqing Huang, and Xiaomin Ren "Analysis of the structures and characteristics for an InP-based micromechanical tunable filter", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.578453

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