Continuously tunable InP-based multiple air-gap MOEMS filters with ultrawide tuning range

Soeren Irmer; Juergen Daleiden; Ventzeslav Rangelov; Cornelia Prott; Friedhard Roemer; Martin Strassner; Amer Tarraf; Hartmut Hillmer

doi:10.1117/12.471977

25 March 2003 Continuously tunable InP-based multiple air-gap MOEMS filters with ultrawide tuning range

Soeren Irmer, Juergen Daleiden, Ventzeslav Rangelov, Cornelia Prott, Friedhard Roemer, Martin Strassner, Amer Tarraf, Hartmut Hillmer

Author Affiliations +

Proceedings Volume 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly; (2003) https://doi.org/10.1117/12.471977
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

Continuously tunable Fabry-Perot filters manufactured using multiple air-gap MOEMS technology are studied and presented. The InP/air-gap filters optimized for optical telecommunication systems using the third optical telecommunication window (1550nm) exhibit a wide tuning range of 142nm and an extremely wide stop-band of 550nm (1250nm-1800nm). The tuning is continuously adjustable requiring ultra-low actuation voltages between 0V (1599nm) and 3.2V (1457nm). The filters are based on a relatively simple vertical structure which is fabricated by few surface micro machining steps. No mirror alignment or subsequent micro mounting are necessary facilitating a compact batch process production.

Citation Download Citation

Soeren Irmer, Juergen Daleiden, Ventzeslav Rangelov, Cornelia Prott, Friedhard Roemer, Martin Strassner, Amer Tarraf, and Hartmut Hillmer "Continuously tunable InP-based multiple air-gap MOEMS filters with ultrawide tuning range", Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); https://doi.org/10.1117/12.471977

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