Technological Advances In Microcircuit Step And Repeat Cameras And Their Relationship To The Future Needs Of The Semiconductor Industry

Thomas Wing

doi:10.1117/12.954248

1 March 1974 Technological Advances In Microcircuit Step And Repeat Cameras And Their Relationship To The Future Needs Of The Semiconductor Industry

Thomas Wing

Author Affiliations +

Proceedings Volume 0055, Technological Advances in Micro and Submicro Photofabrication Imagery; (1974) https://doi.org/10.1117/12.954248
Event: Acquisition and Analysis of Pictorial Data, 1974, San Diego, United States

Abstract

The step and repeat camera specifically designed for the production of semiconductor integrated circuits today transcends all technological boundaries in its capabilities for meeting demands which are difficult to comprehend, even to those of us who design and use them on a daily basis. We speak in terms of "quarter micron" repeatability like a lathe hand speaks of "plus or minus a mil". Yet the magnitude of a quarter micron is so small that an objective lens with a numerical aperture of 0.57 is required to theoretically resolve it. Such a lens would have an equivalent f stop of f:0.9. While the analogy may not be accurate, the impact of the technogical requirements of the semiconductor industry may be reflected in such exhaustive and even exaggerated demands.

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Thomas Wing "Technological Advances In Microcircuit Step And Repeat Cameras And Their Relationship To The Future Needs Of The Semiconductor Industry", Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); https://doi.org/10.1117/12.954248

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