Reduction of image placement errors in EPL masks

Obert R. Wood II; Phillip L. Reu; Roxann L. Engelstad; Edward G. Lovell; Michael J. Lercel; Carey W. Thiel; Mark S. Lawliss; R. Scott Mackay

doi:10.1117/12.490136

16 June 2003 Reduction of image placement errors in EPL masks

Obert R. Wood II, Phillip L. Reu, Roxann L. Engelstad, Edward G. Lovell, Michael J. Lercel, Carey W. Thiel, Mark S. Lawliss, R. Scott Mackay

Author Affiliations +

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.490136
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Minimizing mask-level distortions is critical to ensuring the success of electron projection lithography (EPL) in the sub-65-nm regime. Previous research has demonstrated the importance of controlling the stress in the patterned stencil membranes to minimize image placement distortions. Low-stress, 100-mm diameter EPL mask blanks have been patterned with a layout that simulates the effects of the cross-mask and intra-subfield pattern density gradients found in a realistic circuit design. Extensive IP measurements were made to illustrate how local subfield correction schemes can be used to reduce all mask-level distortions (regardless of pattern type) to less than 15 nm (3s). Combining membrane stress control with the use of repeatable and identical reticle chucking is expected to reduce EPL mask-level distortions to the values that will be needed for the 65-nm design node.

Citation Download Citation

Obert R. Wood II, Phillip L. Reu, Roxann L. Engelstad, Edward G. Lovell, Michael J. Lercel, Carey W. Thiel, Mark S. Lawliss, and R. Scott Mackay "Reduction of image placement errors in EPL masks", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.490136

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available