Distortion management strategy for EPL reticle

Hajime Yamamoto; Takashi Aoyama; Noriyuki Hirayanagi; Kazuaki Suzuki

doi:10.1117/12.483743

16 June 2003 Distortion management strategy for EPL reticle

Hajime Yamamoto, Takashi Aoyama, Noriyuki Hirayanagi, Kazuaki Suzuki

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.483743
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

For position measurements of the EPL reticle, a new concept reticle holder is proposed. This holder clamps the same surface during measurement as during exposure in Nikon's EPL tool, the EB Stepper. Thus the holder reproduces the deformation caused by clamping in a metrology tool with that in the EB Stepper. Investigation by simulation is described. Furthermore, an experimental holder based on this concept was manufactured, and the deformation of a 200 mm EPL reticle was measured. The experimental results and simulation results show an advantage of this method.

Citation Download Citation

Hajime Yamamoto, Takashi Aoyama, Noriyuki Hirayanagi, and Kazuaki Suzuki "Distortion management strategy for EPL reticle", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.483743

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