Three-dimensional structuring of glass by ultrashort laser pulses

Stefan Nolte; Matthias Will; Jonas Burghoff; Andreas Tuennermann

doi:10.1117/12.477847

17 January 2003 Three-dimensional structuring of glass by ultrashort laser pulses

Stefan Nolte, Matthias Will, Jonas Burghoff, Andreas Tuennermann

Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.477847
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Using tightly focused femtosecond laser pulses waveguides can be fabricated inside various glasses. This technique has the potential to generate not only planar but three-dimensional photonic devices. In this paper we present, to the best of our knowledge, the first three-dimensional integrated optical device, a 1×3 splitter. The optical properties of this device will be discussed.

Citation Download Citation

Stefan Nolte, Matthias Will, Jonas Burghoff, and Andreas Tuennermann "Three-dimensional structuring of glass by ultrashort laser pulses", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.477847

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available