Femtosecond-laser-induced refractive index modifications for fabrication of three-dimensional integrated optical devices

Matthias Will; Jonas Burghoff; Stefan Nolte; Andreas Tuennermann

doi:10.1117/12.468496

15 April 2003 Femtosecond-laser-induced refractive index modifications for fabrication of three-dimensional integrated optical devices

Matthias Will, Jonas Burghoff, Stefan Nolte, Andreas Tuennermann

Author Affiliations +

Proceedings Volume 4941, Laser Micromachining for Optoelectronic Device Fabrication; (2003) https://doi.org/10.1117/12.468496
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

We present the fabrication of three-dimensional waveguide structures indide fused silica using the femtosecond laser direct-writing technique. The guiding properties of a produced 1x3 splitter are studied in detail. By appropriate choice of the processing parameters a multimode entrance port can be generated which allows to vary the splitting ratio by changing the input coupling. The processing requirements for such splitter devices will be discussed.

Citation Download Citation

Matthias Will, Jonas Burghoff, Stefan Nolte, and Andreas Tuennermann "Femtosecond-laser-induced refractive index modifications for fabrication of three-dimensional integrated optical devices", Proc. SPIE 4941, Laser Micromachining for Optoelectronic Device Fabrication, (15 April 2003); https://doi.org/10.1117/12.468496

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