Vacuum spark discharge soft x-ray source

Meisheng Xu; Rubin Ye; Xiaoming Guo; Yuriy Antoshko; Steve Drew; Ivan Ahtik; Jerzy Orzechowski; Emilio Panarella

doi:10.1117/12.449860

6 December 2001 Vacuum spark discharge soft x-ray source

Meisheng Xu, Rubin Ye, Xiaoming Guo, Yuriy Antoshko, Steve Drew, Ivan Ahtik, Jerzy Orzechowski, Emilio Panarella

Proceedings Volume 4502, Advances in Laboratory-based X-Ray Sources and Optics II; (2001) https://doi.org/10.1117/12.449860
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

The vacuum spark X-ray source is a device operating at high frequency, of the order of several kilohertz, where the X- rays are emitted in small dose in each pulse. At ALFT, we are developing such X-ray sources for lithography in a series of models called VSX. Continuous operation at 10 kHz, full voltage (14~15 kV) for more than 9 hours has been routinely obtained with a carefully designed trigger and a movable anode. The X-ray output is 275 (mu) J/pulse at the source with a capacitance of 13 nF. An extendibility study has been carried out focused mainly on debris management and heat dissipation. The study evaluated the possibility of extending the machine to the 150 W X-ray output level required by the semiconductor industry within the operating regime of 40 kHz and anode moving at speed up to 11.2 m/sec.

Citation Download Citation

Meisheng Xu, Rubin Ye, Xiaoming Guo, Yuriy Antoshko, Steve Drew, Ivan Ahtik, Jerzy Orzechowski, and Emilio Panarella "Vacuum spark discharge soft x-ray source", Proc. SPIE 4502, Advances in Laboratory-based X-Ray Sources and Optics II, (6 December 2001); https://doi.org/10.1117/12.449860

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