Infrared optical properties of PbZrxTi1-xO3 thin films

Zhiming Huang; Chunping Jiang; Pingxiong Yang; Zhanhong Zhang; Junhao Chu

doi:10.1117/12.408346

29 November 2000 Infrared optical properties of PbZr_xTi_1-xO₃thin films

Zhiming Huang, Chunping Jiang, Pingxiong Yang, Zhanhong Zhang, Junhao Chu

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408346
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Lead zirconate titanate PbZr_xTi_1-xO₃ (PZT) thin films grown on Pt/Ti/SiO₂/Si substrates with x equals 0.3 and 0.5 have been measured by infrared spectroscopic ellipsometry (IRSE). The IRSE data measured at an angle of incidence 75 degree(s) for x equals 0.3 and 70 degree(s) for x equals 0.5 are fitted by a proposed dielectric function formula. The refractive index and extinction coefficient of PZT with x equals 0.3 and 0.5 are determined in the spectral range of 2.5 - 12.5 micrometers . As the wavelength increases, the refractive index decreases, on the contrary, the extinction coefficient increases. The absorption coefficient for x equals 0.5 is greater about 1.5 times than that for x equals 0.3. The effective static charges of PZT is also derived by fitting the IRSE data. The values obtained are 1.792 +/- 0.031 and 1.838 +/- 0.0465 for PZT with x equals 0.3 and 0.5, respectively. The results reveal that charge transfer is not complete in PbZr_xTi_1-xO₃ thin films.

Citation Download Citation

Zhiming Huang, Chunping Jiang, Pingxiong Yang, Zhanhong Zhang, and Junhao Chu "Infrared optical properties of PbZr_xTi_1-xO₃thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408346

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